Powering Plasma Processes with Precision & Reliability
Modern plasma processes demand unmatched power stability, fine frequency control, and long-term reliability, areas where traditional magnetron systems fall short. Our solid-state microwave power platform delivers clean, stable RF power up to 850W at 2.45 GHz, enabling consistent plasma performance in front-end and back-end wafer processing.
Ideal applications
Plasma Etch (Dry, RIE)
Delivers stable RF power for precise anisotropic etching and uniform critical dimension control.
PECVD / ALD Deposition Tools
Enables consistent plasma excitation for high-quality thin film deposition at low temperatures.
Post-Etch Cleaning, Photoresist Stripping
Supports residue removal and surface conditioning with controllable plasma energy profiles.
Back-End Packaging & Substrate Treatment
Improves adhesion, surface activation, and contamination control in advanced packaging processes.
Featured products
KU SG 2.45 - 450 A
High Power Microwave Generator 450 W
- Remote control - Frequency and output power configurable - Operational safety through numerous protection circuits and monitoring With the KU SG 2.45 - 450 A Kuhne electronic offers a innovative high-power microwave generator for the ISM frequency range at 2.4 to 2.5 GHz with capability of power combining to higher power ranges. This provides a solution for all kind of industrial applications from plasma generation over PECVD and microwave heating towards surface and material treatment. The KU SG 2.45–450 A can be controlled via a serial interface (3.3 V level). Warnings and alarms are signaled through a LED on the signal generator. The RF output signal can be adjusted between 2400 … 2500 MHz in steps of up to 10 kHz; the output power is adjustable between 0 and 450 W in steps of 1 W. Protection against mismatch (adjustable) and overtemperature are integrated. Included supply: DC-supply connector Sub-D control-connector
- Frequency range
- 2400 ... 2500 MHz
- Output power
- 0 ... 450 W
- Frequency accuracy
- +/- 3 ppm
- Power steps
- 1 Watt
- Pulsewidth
- 25 ... 99990 µs
- Pulsperiod
- 26 ... 99999 µs
- Protection functions
- VSWR (Isolator), Over Temperature, OVP, UVP, OCP
- Output / impedance
- 0 ... 450 W at 50 Ohms
- Supply Voltage
- 32 V DC
- Current consumption
- typ. 26 A @ 450W
- Dimensions
- 180 x 65 x 40 mm
- Weight
- 1500 g (typ.)
KU PA BB 005250 - 2 A
RF Broadband Amplifier, 50 ... 2500 MHz, 2 W
RF Broadband Amplifier, 50 ... 2500 MHz, 2 W
- Frequency range
- 50..2500 MHz
- Input power for P1dB
- typ. +3 dBm
- Maximum input power
- +10 dBm
- Output power P1dB
- typ. 33 dBm, min. 32.5 dBm (CW)
- Output power P3dB
- typ. 34.7 dBm, min. 33.4 dBm (CW)
- Gain (small signal)
- typ. 33 dB, min. 31 dB
- Gain flatness (small signal)
- typ. +/- 1 dB
- Harmonic rejection
- min. 25 dB, typ. 30 dB
- IM3 (1)
- min. 35 dBc @ 30 dBm PEP
- Supply voltage
- +24 ... 26 V DC
- Current consumption
- -20 ... +55 °C
- Dimensions (mm)
- 80 x 60 x 20
- Weight
- 140 g (typ.)
KU DIV 2.45 - N - 716
Power Combiner Kit 850 W
To achieve a higher power level at 2.4 - 2.5 GHz the KU DIV 2.45 - N - 716 combiner can be used to connect two KU SG 2.45 - 450 A microwave power generators. The automatic phase control of the combiner guarantees the optimal performance out of both generators. With a power of up to 850 watts over the frequency range of 2.4 - 2.5 GHz, the power can be adjusted in 2 watt increments. The combiner is tuned and calibrated at the factory together with 2 generators. This can also be done later if the generators are already in place. The specification only refers to the use of two KU SG 2.45 - 450 A Microwave Power Generators
- Output power
- 2 - 800 Watt
- Power steps
- 2 Watt
- Frequency range
- 2400 - 2500 MHz
- Frequency step
- 1 MHz
- Output connector
- 7/16 - Female 50 ohms
- Input connector
- 2x N-Plug Male
- Supply Voltage
- 10 - 36 VDC
- Current consumption
- max. 100 mA
- Dimensons
- 110 x 110 x 45 mm
- Weight
- 1150 g
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